TY  - BOOK
AU  - Postek, Michael, ed.
TI  - Microlithography and Metrology in Micromachining II
T2  - Proceedings of SPIE; V. 2880
SN  - 9780819422781 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2880
ER  -