@book{28279,
	author = {Postek, Michael, ed.},
	title = {Microlithography and Metrology in Micromachining II},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2880},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2880}
}