TY  - BOOK
AU  - Postek, Michael, ed.
TI  - Microlithography and Metrology in Micromachining
T2  - Proceedings of SPIE; V. 2640
SN  - 9780819420060 (Print)
PY  - 1995///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2640
ER  -