TY  - BOOK
AU  - Yoon, Soon Fatt, ed.
TI  - Microlithographic Techniques in IC Fabrication
T2  - Proceedings of SPIE; V. 3183
SN  - 9780819426109 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3183
ER  -