@book{28276,
	author = {Yoon, Soon Fatt, ed.},
	title = {Microlithographic Techniques in IC Fabrication},
	publisher = {SPIE},
	year = {1997},
	series = {Proceedings of SPIE; V. 3183},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3183}
}