@book{28253,
	author = {Hariz, Alex, ed.},
	title = {Microelectronics: Design, Technology, and Packaging III},
	publisher = {SPIE},
	year = {2007},
	series = {Proceedings of SPIE; V. 6798},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6798}
}