TY  - BOOK
AU  - Chen, Fusen, ed.
TI  - Microelectronics Technology and Process Integration
T2  - Proceedings of SPIE; V. 2335
SN  - 9780819416681 (Print)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2335
ER  -