00524nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245007200118260003200190300002000222490003300242856010300275IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819416674 (Print)  cIIA Library  aVasquez, Barbara, ed. 0aMicroelectronics Manufacturability, Yield, and Reliabilityh[eBook]  aWashington, USAbSPIEc1994  aOnline resource  aProceedings of SPIE; V. 2334  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2334yClick Here to Access eBook