Motamedi, M. Edward, ed. <br/><br/>
Microelectronic Structures and MEMS for Optical Processing IV  [eBook] 

 - Washington, USA  SPIE  1998 
 - Online resource 
 - Proceedings of SPIE; V. 3513 .
<br/><br/><label>ISBN: </label>9780819429728 (Print)