@book{28245,
	author = {Motamedi, M. Edward, ed.},
	title = {Microelectronic Structures and MEMS for Optical Processing IV},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3513},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3513}
}