00761nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003600092245007600128260003200204300002000236490003300256856010300289942000700392999001700399952016300416IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819426581 (Print)  cIIA Library  aMotamedi, M. Edward, ed.945455 0aMicroelectronic Structures and MEMS for Optical Processing IIIh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  aProceedings of SPIE; V. 3226  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3226yClick Here to Access eBook  cEB  c28244d28244  00104070aBANbBANd2011-07-01eSPIEhV. 3226l0pEB7704r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3226w2021-11-05yEB