TY  - BOOK
AU  - Motamedi, M. Edward, ed.
TI  - Microelectronic Structures and MEMS for Optical Processing III
T2  - Proceedings of SPIE; V. 3226
SN  - 9780819426581 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3226
ER  -