Motamedi, M. Edward, ed. <br/><br/>
Microelectronic Structures and MEMS for Optical Processing III  [eBook] 

 - Washington, USA  SPIE  1997 
 - Online resource 
 - Proceedings of SPIE; V. 3226 .
<br/><br/><label>ISBN: </label>9780819426581 (Print)