Motamedi, M. Edward, ed. <br/><br/>
Microelectronic Structures and MEMS for Optical Processing II  [eBook] 

 - Washington, USA  SPIE  1996 
 - Online resource 
 - Proceedings of SPIE; V. 2881 .
<br/><br/><label>ISBN: </label>9780819422798 (Print)