00500nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245005000116260003200166300002000198490003300218856010300251IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819429650 (Print)  cIIA Library  aBurnett, David, ed. 0aMicroelectronic Device Technology IIh[eBook]  aWashington, USAbSPIEc1998  aOnline resource  aProceedings of SPIE; V. 3506  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3506yClick Here to Access eBook