@book{28233,
	author = {Burnett, David, ed.},
	title = {Microelectronic Device Technology II},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3506},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3506}
}