TY  - BOOK
AU  - Chen, Ih-Chin, ed.
TI  - Microelectronic Device and Multilevel Interconnection Technology II
T2  - Proceedings of SPIE; V. 2875
SN  - 9780819422736 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2875
ER  -