00530nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245008100115260003200196300002000228490003300248856010300281IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819422736 (Print)  cIIA Library  aChen, Ih-Chin, ed. 0aMicroelectronic Device and Multilevel Interconnection Technology IIh[eBook]  aWashington, USAbSPIEc1996  aOnline resource  aProceedings of SPIE; V. 2875  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2875yClick Here to Access eBook