Chen, Ih-Chin, ed. <br/><br/>
Microelectronic Device and Multilevel Interconnection Technology II  [eBook] 

 - Washington, USA  SPIE  1996 
 - Online resource 
 - Proceedings of SPIE; V. 2875 .
<br/><br/><label>ISBN: </label>9780819422736 (Print)