TY  - BOOK
AU  - Chiao, Jung-Chih, ed.
TI  - Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
T2  - Proceedings of SPIE; V. 5650
SN  - 9780819456106 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5650
ER  -