Chiao, Jung-Chih, ed. <br/><br/>
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II  [eBook] 

 - Washington, USA  SPIE  2005 
 - Online resource 
 - Proceedings of SPIE; V. 5650 .
<br/><br/><label>ISBN: </label>9780819456106 (Print)