@book{28222,
	author = {Chiao, Jung-Chih, ed.},
	title = {Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II},
	publisher = {SPIE},
	year = {2005},
	series = {Proceedings of SPIE; V. 5650},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5650}
}