TY  - BOOK
AU  - George, Thomas, ed.
TI  - Micro- and Nanotechnology Sensors, Systems, and Applications XI
T2  - Proceedings of SPIE; V. 10982
SN  - 9781510626294 (Print)
PY  - 2019///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10982
ER  -