00568nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002400119245007700143260003200220300002000252490003400272856010400306IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510626294 (Print)  a9781510626300 (Online)  cIIA Library  aGeorge, Thomas, ed. 0aMicro- and Nanotechnology Sensors, Systems, and Applications XIh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 10982  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10982yClick Here to Access eBook