George, Thomas, ed. <br/><br/>
Micro- and Nanotechnology Sensors, Systems, and Applications XI  [eBook] 

 - Washington, USA  SPIE  2019 
 - Online resource 
 - Proceedings of SPIE; V. 10982 .
<br/><br/><label>ISBN: </label>9781510626294 (Print) 9781510626300 (Online)