TY  - BOOK
AU  - George, Thomas, ed.
TI  - Micro- and Nanotechnology Sensors, Systems, and Applications VI
T2  - Proceedings of SPIE; V. 9083
SN  - 9781628410204 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9083
ER  -