@book{28214,
	author = {George, Thomas, ed.},
	title = {Micro- and Nanotechnology Sensors, Systems, and Applications IX},
	publisher = {SPIE},
	year = {2017},
	series = {Proceedings of SPIE; V. 10194},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10194}
}