00494nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245004500115260003200160300002000192490003300212856010300245IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819472380 (Print)  cIIA Library  aValiev, Kamil, ed. 0aMicro- and Nanoelectronics 2007h[eBook]  aWashington, USAbSPIEc2008  aOnline resource  aProceedings of SPIE; V. 7025  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7025yClick Here to Access eBook