@book{28202,
	author = {Valiev, Kamil, ed.},
	title = {Micro- and Nanoelectronics 2005},
	publisher = {SPIE},
	year = {2006},
	series = {Proceedings of SPIE; V. 6260},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6260}
}