TY  - BOOK
AU  - Valiev, Kamil, ed.
TI  - Micro- and Nanoelectronics 2003
T2  - Proceedings of SPIE; V. 5401
SN  - 9780819453242 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5401
ER  -