@book{28201,
	author = {Valiev, Kamil, ed.},
	title = {Micro- and Nanoelectronics 2003},
	publisher = {SPIE},
	year = {2004},
	series = {Proceedings of SPIE; V. 5401},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5401}
}