00750nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003100092245007000123260003200193300002000225490003300245856010300278942000700381999001700388952016300405IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819462794 (Print)  cIIA Library  aGeorge, Thomas, ed.945422 0aMicro (MEMS) and Nanotechnologies for Space Applicationsh[eBook]  aWashington, USAbSPIEc2006  aOnline resource  aProceedings of SPIE; V. 6223  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6223yClick Here to Access eBook  cEB  c28199d28199  00104070aBANbBANd2011-07-01eSPIEhV. 6223l0pEB7659r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6223w2021-11-05yEB