TY  - BOOK
AU  - George, Thomas, ed.
TI  - Micro (MEMS) and Nanotechnologies for Space Applications
T2  - Proceedings of SPIE; V. 6223
SN  - 9780819462794 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6223
ER  -