@book{28199,
	author = {George, Thomas, ed.},
	title = {Micro (MEMS) and Nanotechnologies for Space Applications},
	publisher = {SPIE},
	year = {2006},
	series = {Proceedings of SPIE; V. 6223},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6223}
}