TY  - BOOK
AU  - Tobin, Kenneth, ed.
TI  - Metrology-based Control for Micro-Manufacturing
T2  - Proceedings of SPIE; V. 4275
SN  - 9780819439536 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4275
ER  -