@book{28197,
	author = {Tobin, Kenneth, ed.},
	title = {Metrology-based Control for Micro-Manufacturing},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4275},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4275}
}