@book{28181,
	author = {Archie, Charles, ed.},
	title = {Metrology, Inspection, and Process Control for Microlithography XX},
	publisher = {SPIE},
	year = {2006},
	series = {Proceedings of SPIE; V. 6152},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6152}
}