@book{28180,
	author = {Silver, Richard, ed.},
	title = {Metrology, Inspection, and Process Control for Microlithography XVIII},
	publisher = {SPIE},
	year = {2004},
	series = {Proceedings of SPIE; V. 5375},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5375}
}