Herr, Daniel, ed. <br/><br/>
Metrology, Inspection, and Process Control for Microlithography XVI  [eBook] 

 - Washington, USA  SPIE  2002 
 - Online resource 
 - Proceedings of SPIE; V. 4689 .
<br/><br/><label>ISBN: </label>9780819444356 (Print)