TY  - BOOK
AU  - Silver, Richard, ed.
TI  - Metrology, Inspection, and Process Control for Microlithography XIX
T2  - Proceedings of SPIE; V. 5752
SN  - 9780819457325 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5752
ER  -