TY  - BOOK
AU  - Singh, Bhanwar, ed.
TI  - Metrology, Inspection, and Process Control for Microlithography XII
T2  - Proceedings of SPIE; V. 3332
SN  - 9780819427779 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3332
ER  -