@book{28173,
	author = {Singh, Bhanwar, ed.},
	title = {Metrology, Inspection, and Process Control for Microlithography XII},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3332},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3332}
}