00757nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002900092245007900121260003200200300002000232490003300252856010300285942000700388999001700395952016300412IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819421012 (Print)  cIIA Library  aJones, Susan, ed.945402 0aMetrology, Inspection, and Process Control for Microlithography Xh[eBook]  aWashington, USAbSPIEc1996  aOnline resource  aProceedings of SPIE; V. 2725  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2725yClick Here to Access eBook  cEB  c28171d28171  00104070aBANbBANd2011-07-01eSPIEhV. 2725l0pEB7631r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2725w2021-11-05yEB