TY  - BOOK
AU  - Jones, Susan, ed.
TI  - Metrology, Inspection, and Process Control for Microlithography X
T2  - Proceedings of SPIE; V. 2725
SN  - 9780819421012 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2725
ER  -