00527nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245007900114260003200193300002000225490003300245856010300278IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819421012 (Print)  cIIA Library  aJones, Susan, ed. 0aMetrology, Inspection, and Process Control for Microlithography Xh[eBook]  aWashington, USAbSPIEc1996  aOnline resource  aProceedings of SPIE; V. 2725  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2725yClick Here to Access eBook