@book{28171,
	author = {Jones, Susan, ed.},
	title = {Metrology, Inspection, and Process Control for Microlithography X},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2725},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2725}
}