TY  - BOOK
AU  - Gildenblat, Gennady, ed.
TI  - Metallization: Performance and Reliability Issues for VLSI and ULSI
T2  - Proceedings of SPIE; V. 1596
SN  - 9780819407276 (Print)
PY  - 1991///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1596
ER  -