00536nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245008100121260003200202300002000234490003300254856010300287IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819407276 (Print)  cIIA Library  aGildenblat, Gennady, ed. 0aMetallization: Performance and Reliability Issues for VLSI and ULSIh[eBook]  aWashington, USAbSPIEc1991  aOnline resource  aProceedings of SPIE; V. 1596  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1596yClick Here to Access eBook