Gildenblat, Gennady, ed. <br/><br/>
Metallization: Performance and Reliability Issues for VLSI and ULSI  [eBook] 

 - Washington, USA  SPIE  1991 
 - Online resource 
 - Proceedings of SPIE; V. 1596 .
<br/><br/><label>ISBN: </label>9780819407276 (Print)