@book{28132,
	author = {Gildenblat, Gennady, ed.},
	title = {Metallization: Performance and Reliability Issues for VLSI and ULSI},
	publisher = {SPIE},
	year = {1991},
	series = {Proceedings of SPIE; V. 1596},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1596}
}